Chamber Polish
本公司具有多年的刷機經驗以及專業的刷機人員可進廠為您做客製化的評估，如有需求請直接洽公司人員詢問。
※如有需求，請洽公司人員詢問。
Vacuum Chamber High Precision PM Procedures
AMAT
- AMAT Endura®* CVD/PVD Lid Clean PM Procedure (PDF)
- AMAT Endura®* PVD DeGas Chamber Heater PM - 1st Generation PM Procedure (PDF)
- AMAT Endura®* PVD DeGas Chamber Heater PM - 3rd Generation PM Procedure (PDF)
LAM
- LAM 2300 Exelan Flex Oxide Etch Chamber PM Procedure (PDF)
- LAM 2300 - Metal Etch Chamber Clean - Heavy Deposition PM Procedure (PDF)
- LAM 2300 - Metal Etch Chamber Clean - Light Deposition PM Procedure (PDF)