Chamber Polish
Our company has many years of experience in chamber polishing and employs professional staff who can conduct customized evaluations at your facility. If you have any needs, please contact our staff directly for inquiries.
※If you have any requirements, please contact our staff for inquiries.
Vacuum Chamber High Precision PM Procedures
AMAT
- AMAT Endura®* CVD/PVD Lid Clean PM Procedure (PDF)
- AMAT Endura®* PVD DeGas Chamber Heater PM - 1st Generation PM Procedure (PDF)
- AMAT Endura®* PVD DeGas Chamber Heater PM - 3rd Generation PM Procedure (PDF)
LAM
- LAM 2300 Exelan Flex Oxide Etch Chamber PM Procedure (PDF)
- LAM 2300 - Metal Etch Chamber Clean - Heavy Deposition PM Procedure (PDF)
- LAM 2300 - Metal Etch Chamber Clean - Light Deposition PM Procedure (PDF)