Enhancing KLA Metrology Tool Performance and Cost of Ownership with MiraWIPE

Date: 06/27/2025    By: 59Clean

In the semiconductor industry, KLA metrology tools play a critical role in ensuring the quality and reliability of wafer fabrication processes. However, particle contamination can significantly impact the performance and cost of ownership of these tools. In this blog, we’ll explore how MiraWIPE, a leading cleanroom microfiber wiper, can help enhance the performance and cost of ownership of KLA metrology tools.

The Cost of Particle Contamination

Particle contamination is a leading cause of unscheduled preventive maintenance (PMs), expensive repairs, and replacements of critical components in KLA metrology tools. Particles can accumulate on optical components, such as prisms, beam splitters, and optics, causing measurement errors, signal degradation, and, ultimately, tool downtime.

According to industry estimates, particle contamination can account for up to 50% of all unscheduled PMs and repairs in KLA metrology tools. The cost of repairing or replacing critical components can be substantial, with prices ranging from 10,000 to 50,000 or more per incident.

The Impact on Chuck’s Performance

Chucks, critical components in KLA metrology tools, are also susceptible to particle contamination. When particles accumulate on the chuck surface, they can cause measurement errors, damage the chuck, and even contaminate the wafer.

The cost of repairing or replacing a chuck can range from 5,000 to 20,000 or more, depending on the type and complexity of the chuck. Moreover, the downtime associated with chuck repairs or replacements can significantly impact tool utilization and overall productivity.

How MiraWIPE Can Help

MiraWIPE, a leading cleanroom microfiber wiper, is designed to effectively remove particles and contaminants from surfaces without generating new ones. Its soft, absorbent, and abrasion-free fabric makes it ideal for cleaning sensitive surfaces, including KLA metrology tools and chucks.

By using MiraWIPE for cleaning KLA metrology tools and chucks, operators can:

- Reduce particle contamination: MiraWIPE’s microfiber fabric effectively removes particles and debris, reducing the risk of contamination and associated costs.

- Minimize unscheduled PMs and repairs: By reducing particle contamination, MiraWIPE can help minimize unscheduled PMs and repairs, resulting in lower costs and improved tool utilization.

- Extend component lifespan: MiraWIPE’s gentle cleaning action helps extend the lifespan of critical components, such as prisms, beam splitters, and optics.

- Improve tool performance: By maintaining a clean and particle-free environment, MiraWIPE can help improve tool performance, accuracy, and precision.

Cost of Ownership Benefits

The use of MiraWIPE can provide significant cost of ownership benefits for KLA metrology tool operators, including:

- Reduced maintenance costs: MiraWIPE can help reduce maintenance costs and improve tool utilization by minimizing unscheduled PMs and repairs.

- Extended component lifespan: MiraWIPE’s gentle cleaning action helps extend the lifespan of critical components, reducing the need for costly repairs or replacements.

- Improved tool performance: By maintaining a clean and particle-free environment, MiraWIPE can help improve tool performance, accuracy, and precision, resulting in higher productivity and yield.

Conclusion

Particle contamination is a significant challenge in KLA metrology tool operations, leading to unscheduled PMs, expensive repairs, and replacements of critical components. MiraWIPE, a leading cleanroom microfiber wiper, offers an effective solution for reducing particle contamination and improving the performance and cost of ownership of KLA metrology tools.

Using MiraWIPE to clean KLA metrology tools and chucks, operators can minimize unscheduled PMs and repairs, extend component lifespan, and improve tool performance. With its soft, absorbent, and abrasion-free fabric, MiraWIPE is ideal for cleaning sensitive surfaces in wafer fabs.

MiraWIPE® Product Info: https://www.59clean.com.tw/en/html/product/show.php?pid=239&cid=93&cid2=91

Original Link: https://www.foamtecintlwcc.com/enhancing-kla-metrology-tool-performance-and-cost-of-ownership-with-mirawipe/