Chamber Polish
本公司具有多年的刷机经验以及专业的刷机人员可进厂为您做客制化的评估，如有需求请直接洽公司人员询问。
※如有需求，请洽公司人员询问。
Vacuum Chamber High Precision PM Procedures
AMAT
- AMAT Endura®* CVD/PVD Lid Clean PM Procedure (PDF)
- AMAT Endura®* PVD DeGas Chamber Heater PM - 1st Generation PM Procedure (PDF)
- AMAT Endura®* PVD DeGas Chamber Heater PM - 3rd Generation PM Procedure (PDF)
LAM
- LAM 2300 Exelan Flex Oxide Etch Chamber PM Procedure (PDF)
- LAM 2300 - Metal Etch Chamber Clean - Heavy Deposition PM Procedure (PDF)
- LAM 2300 - Metal Etch Chamber Clean - Light Deposition PM Procedure (PDF)